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Applied Physics and Mathematics

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Development results of MEMS gyroscopes with mutually spaced eigenfrequencies
A.V. Soloviev

Alternatives designs (differ by kinematics of working path
and fabrication technique) of MEMS gyroscopes with mutually
spaced eigenfrequencies for russian enterprises facilities
are presented. Differential equations of silicon gimbal motion
are derived. Choice set to decrease inaccuracy of manufacturing
error are suggested. Such operation principle ensure
the accuracy enhancement by frequency separation between
useful and quadrature components. This hypothesis was confirmed
by preliminary test data of developmental MEMS gyroscopes,
developed by TsENKI Division Kuznetsov Applied
Mechanics Research Institute and produced in Russian Federation,
when precision features (bias and its stability, scale
factor and its linearity, angular rate range, and cross coupling
between channels) were determined. Also, comparison with
analogs was made.
The keywords: MEMS, micromechanical gyroscope, quadrature
error, frequency separation.

Contacts: Е-mail: al.vl.soloviev@gmail.com

Pp. 03-19.

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