Applied Physics and Mathematics Annotation << Back FEATURES OF A LOW-PRESSURE HYBRID RF DISCHARGE P.A. NEKLIUDOVA, E.A. KRAL’KINA, K.V. VAVILIN, I.I. ZADIRIEV, A.M. NIKONOV The present work deals with the study of the plasma parameters of a hybrid radio-frequency (RF) discharge. It is a new modifi cation of the known forms of radio-frequency discharges, i.e. inductive and capacitive. The power input unit of such discharge represents a parallel-connected solenoidal antenna and capacitor plates located on the lateral and end surfaces of the plasma source, respectively. There is a dividing capacitor between the antenna and the capacitor plates, which allows to regulate the contribution of the capacitive channel to the discharge maintaining. The infl uence of the dividing capacitance value, the power of the RF generator and the argon pressure on the plasma parameters (the electron energy distribution function, its eff ective temperature and concentration, as well as the characteristics of the near-electrode space charge layers) of a hybrid RF discharge is described in detail. A comparison of the properties of a hybrid RF discharge with purely capacitive and inductive discharges showed that the plasma parameters of a hybrid discharge fi ll the interval between the plasma parameters of the inductive and capacitive RF discharge in the considered range of dividing capacitances. The change in the external conditions of the discharge maintenance makes it possible to smoothly change its characteristics. Keywords: plasma, discharge, radio-frequency, hybrid, inductive, capacitive. Contacts: E-mail: nekludova_pa@mail.ru Pp. 25-33.